[PDF] Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams

The introduction is for scientists, engineers, students, and business executives who do not necessarily have any prior experience with what are called MEMS by those who know them intimately, but do have an understanding of basic scientific concepts equivalent to first-year college physics and chemistry. Maluf and Williams, both with technology companies, have revised the original text, for which they cite no date, to incorporate developments in the field, new products, and suggestions from readers of the first edition. While maintaining the approach of describing a selection of demonstrators now available commercially or soon to be, they include more practical hints for applying the technology, and expand the discussion on the fabrication processes, adding new methods and materials